Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886102 | Multiple electron beam irradiation apparatus, multiple electron beam irradiation method, and multiple electron beam inspection apparatus | Kazuhiko Inoue, Munehiro Ogasawara | 2021-01-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886102 | Multiple electron beam irradiation apparatus, multiple electron beam irradiation method, and multiple electron beam inspection apparatus | Kazuhiko Inoue, Munehiro Ogasawara | 2021-01-05 |