Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201078 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Cheng-Hsiung Tsai, Hiroyuki Takahama | 2021-12-14 |
| 10892180 | Lift pin assembly | Bonnie T. Chia, Manjunatha Koppa, Vinod Konda Purathe, Cheng-Hsiung Tsai, Aravind Kamath | 2021-01-12 |