Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137692 | Metrology targets and methods with oblique periodic structures | Yoel Feler, Mark Ghinovker, Alexander Svizher, Vladimir Levinski | 2021-10-05 |
| 10990022 | Field-to-field corrections using overlay targets | Enna Leshinsky-Altshuller, Mark Ghinovker, Diana Shaphirov, Guy Ben Dov, Roie Volkovich +1 more | 2021-04-27 |