Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152206 | Compositions and methods using same for carbon doped silicon containing films | Xinjian Lei, Anupama Mallikarjunan, Moo-Sung Kim | 2021-10-19 |
| 11139162 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Matthew R. MacDonald +1 more | 2021-10-05 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Meiliang Wang, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill | 2021-04-27 |
| 10985010 | Methods for making silicon and nitrogen containing films | Xinjian Lei, Moo-Sung Kim | 2021-04-20 |