Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114326 | Substrate chucking and dechucking methods | Wendell Glenn Boyd, Jr., Jim Zhongyi He, Ramesh Gopalan, Robert T. Hirahara | 2021-09-07 |
| 11054317 | Method and apparatus for direct measurement of chucking force on an electrostatic chuck | Charles G. Potter, Wendell Glenn Boyd, Jr., Robert T. Hirahara | 2021-07-06 |