Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114326 | Substrate chucking and dechucking methods | Jim Zhongyi He, Ramesh Gopalan, Robert T. Hirahara, Govinda Raj | 2021-09-07 |
| 11114327 | ESC substrate support with chucking force control | Jim Zhongyi He, Zhenwen Ding | 2021-09-07 |
| 11054317 | Method and apparatus for direct measurement of chucking force on an electrostatic chuck | Charles G. Potter, Govinda Raj, Robert T. Hirahara | 2021-07-06 |