Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054317 | Method and apparatus for direct measurement of chucking force on an electrostatic chuck | Wendell Glenn Boyd, Jr., Govinda Raj, Robert T. Hirahara | 2021-07-06 |
CP
Charles G. Potter
Overall (2021): #496,429 of 548,734Top 95%
1
Patents 2021