Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114326 | Substrate chucking and dechucking methods | Wendell Glenn Boyd, Jr., Ramesh Gopalan, Robert T. Hirahara, Govinda Raj | 2021-09-07 |
| 11114327 | ESC substrate support with chucking force control | Wendell Glenn Boyd, Jr., Zhenwen Ding | 2021-09-07 |