Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114327 | ESC substrate support with chucking force control | Wendell Glenn Boyd, Jr., Jim Zhongyi He | 2021-09-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114327 | ESC substrate support with chucking force control | Wendell Glenn Boyd, Jr., Jim Zhongyi He | 2021-09-07 |