Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201035 | Radical source with contained plasma | Peter Ventzek | 2021-12-14 |
| 11043362 | Plasma processing apparatuses including multiple electron sources | Peter Ventzek, Zhiying Chen, Alok Ranjan | 2021-06-22 |
| 11037765 | Resonant structure for electron cyclotron resonant (ECR) plasma ionization | — | 2021-06-15 |
| 11037798 | Self-limiting cyclic etch method for carbon-based films | Nasim Eibagi, Alok Ranjan, Peter Ventzek | 2021-06-15 |
| 10991554 | Plasma processing system with synchronized signal modulation | Jianping Zhao, Peter Ventzek | 2021-04-27 |