Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094053 | Deep learning based adaptive regions of interest for critical dimension measurements of semiconductor substrates | — | 2021-08-17 |
| 11035666 | Inspection-guided critical site selection for critical dimension measurement | Jagdish Chandra Saraswatula, Hari Pathangi | 2021-06-15 |
| 10970834 | Defect discovery using electron beam inspection and deep learning with real-time intelligence to reduce nuisance | — | 2021-04-06 |
| 10957608 | Guided scanning electron microscopy metrology based on wafer topography | Shivam Agarwal, Jagdish Chandra Saraswatula, Andrew Cross | 2021-03-23 |