AM

Arpan Mahorowala

Lam Research: 2 patents #51 of 349Top 15%
Overall (2021): #90,221 of 548,734Top 20%
3
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11183383 Tin oxide thin film spacers in semiconductor device manufacturing David Charles Smith, Richard Wise, Patrick A. Van Cleemput, Bart J. van Schravendijk 2021-11-23
11094542 Selective deposition of etch-stop layer for enhanced patterning Nagraj Shankar, Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Elham Mohimi +1 more 2021-08-17
11031245 Tin oxide thin film spacers in semiconductor device manufacturing David Charles Smith, Richard Wise, Patrick A. Van Cleemput, Bart J. van Schravendijk 2021-06-08