Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164307 | Misregistration metrology by using fringe Moiré and optical Moiré effects | Yoel Feler, Mark Ghinovker, Evgeni Gurevich, Vladimir Levinski | 2021-11-02 |
| 11137692 | Metrology targets and methods with oblique periodic structures | Yoel Feler, Mark Ghinovker, Vladimir Levinski, Inna Tarshish-Shapir | 2021-10-05 |