Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069553 | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity | John Holland, Harmeet Singh, Alexei Marakhtanov, Keith Gaff, Zhigang Chen +1 more | 2021-07-20 |
| 11024532 | Electrostatic chuck design for cooling-gas light-up prevention | Alexei Marakhtanov, John Holland, Keith Gaff, Felix Kozakevich | 2021-06-01 |