Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10981780 | Membrane support for dual backplate transducers | Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Matthias Herrmann +4 more | 2021-04-20 |
| 10889492 | Methods for producing thin-film layers and microsystems having thin-film layers | Alfred Sigl, Wolfgang Friza | 2021-01-12 |