Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180361 | MEMS device and method for producing the same | Arnaud Walther | 2021-11-23 |
| 11117798 | MEMS-sensor | Gunar Lorenz, Alfons Dehe, Bernd Goller, Ulrich Krumbein, Andreas Wiesbauer | 2021-09-14 |
| 11115755 | Sound transducer structure and method for manufacturing a sound transducer structure | Alfons Dehe, Stefan Barzen | 2021-09-07 |
| 11053117 | MEMS component and production method for a MEMS component | Stefan Barzen, Alfons Dehe, Gunar Lorenz | 2021-07-06 |
| 10981780 | Membrane support for dual backplate transducers | Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Stefan Geissler, Matthias Herrmann +4 more | 2021-04-20 |