Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11212624 | MEMS-transducer and method for producing a MEMS-transducer | Karolina Gierl, Markus Meyer | 2021-12-28 |
| 10981780 | Membrane support for dual backplate transducers | Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Herrmann +4 more | 2021-04-20 |