Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10889492 | Methods for producing thin-film layers and microsystems having thin-film layers | Wolfgang Friza, Stefan Geissler | 2021-01-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10889492 | Methods for producing thin-film layers and microsystems having thin-film layers | Wolfgang Friza, Stefan Geissler | 2021-01-12 |