Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180362 | Method for processing a layer structure and microelectromechanical component | Andre Brockmeier, Daniel Maurer | 2021-11-23 |
| 10889492 | Methods for producing thin-film layers and microsystems having thin-film layers | Alfred Sigl, Stefan Geissler | 2021-01-12 |