Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081643 | Bevel metal removal using ion beam etch | Ashim Dutta, Michael Rizzolo, Theodorus E. Standaert, Daniel C. Edelstein | 2021-08-03 |
| 10892404 | Sacrificial buffer layer for metal removal at a bevel edge of a substrate | Ashim Dutta, Michael Rizzolo, Theodorus E. Standaert, Daniel C. Edelstein | 2021-01-12 |