Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971369 | Plasma processing method and plasma processing apparatus | Miyako Matsui, Tatehito Usui, Kenichi Kuwahara | 2021-04-06 |
| 10937635 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma +1 more | 2021-03-02 |
| 10930476 | Plasma processing device | Tooru Aramaki, Kenetsu Yokogawa | 2021-02-23 |