Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971369 | Plasma processing method and plasma processing apparatus | Miyako Matsui, Tatehito Usui, Masaru Izawa | 2021-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971369 | Plasma processing method and plasma processing apparatus | Miyako Matsui, Tatehito Usui, Masaru Izawa | 2021-04-06 |