Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152237 | Substitute sample, method for determining control parameter of processing, and measurement system | Hyakka Nakada, Takeshi Ohmori, Masaru Kurihara, Naoyuki Kofuji | 2021-10-19 |
| 11112775 | System and method of determining processing condition | Hyakka Nakada, Takeshi Ohmori, Masaru Kurihara | 2021-09-07 |
| 10971369 | Plasma processing method and plasma processing apparatus | Miyako Matsui, Masaru Izawa, Kenichi Kuwahara | 2021-04-06 |