Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D924824 | Ion shield plate base for semiconductor manufacturing apparatus | Kazuyuki Hirozane, Michiaki Kobayashi, Yoshifumi Ogawa | 2021-07-13 |
| 10937635 | Vacuum processing apparatus | Hiroyuki Kobayashi, Nobuya Miyoshi, Kazunori Shinoda, Kenji Maeda, Satoshi Sakai +1 more | 2021-03-02 |