Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152192 | Plasma processing apparatus and method | Naoki Yasui, Norihiko Ikeda, Yasuhiro Nishimori | 2021-10-19 |
| 10930476 | Plasma processing device | Kenetsu Yokogawa, Masaru Izawa | 2021-02-23 |