Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192147 | Substrate processing apparatus and substrate processing method | Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito | 2021-12-07 |
| 11180853 | Substrate processing apparatus and substrate processing method | Fong-Jie Du, Makoto Kashiwagi | 2021-11-23 |
| 11139160 | Apparatus and method for processing a surface of a substrate | Keisuke Uchiyama | 2021-10-05 |
| 10926376 | Method and apparatus for polishing a substrate, and method for processing a substrate | Masayuki Nakanishi, Kenya Ito, Keisuke Uchiyama, Makoto Kashiwagi | 2021-02-23 |