Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192147 | Substrate processing apparatus and substrate processing method | Yu Ishii, Hiroyuki Kawasaki, Kenichi Nagaoka | 2021-12-07 |
| 10926376 | Method and apparatus for polishing a substrate, and method for processing a substrate | Masayuki Nakanishi, Yu Ishii, Keisuke Uchiyama, Makoto Kashiwagi | 2021-02-23 |