Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139160 | Apparatus and method for processing a surface of a substrate | Yu Ishii | 2021-10-05 |
| 10926376 | Method and apparatus for polishing a substrate, and method for processing a substrate | Masayuki Nakanishi, Yu Ishii, Kenya Ito, Makoto Kashiwagi | 2021-02-23 |