Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192147 | Substrate processing apparatus and substrate processing method | Yu Ishii, Kenichi Nagaoka, Kenya Ito | 2021-12-07 |
| 11143186 | Liquid ring vacuum pump | Nozomu Sasaki | 2021-10-12 |