Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Hisajiro Nakano, Tomoatsu Ishibashi, Koichi Fukaya, Yasuyuki Motoshima +1 more | 2021-08-17 |