Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180303 | Storage container of scrubbing member and package of same | Hisajiro Nakano | 2021-11-23 |
| 11164758 | Washing device and washing method | — | 2021-11-02 |
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Hisajiro Nakano, Koichi Fukaya, Yasuyuki Motoshima, Yohei Eto +1 more | 2021-08-17 |
| 11081373 | Substrate cleaning apparatus and substrate cleaning method | — | 2021-08-03 |
| 10991602 | Substrate washing device | Koichi Fukaya, Hisajiro Nakano | 2021-04-27 |
| 10892173 | Substrate cleaning roll, substrate cleaning apparatus, and substrate cleaning method | — | 2021-01-12 |