Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Hisajiro Nakano, Tomoatsu Ishibashi, Koichi Fukaya, Yasuyuki Motoshima, Yohei Eto +1 more | 2021-08-17 |
| 11028467 | Metal-based composite material | Sadayasu Takayama, Yukie Kaku | 2021-06-08 |