Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180303 | Storage container of scrubbing member and package of same | Tomoatsu Ishibashi | 2021-11-23 |
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Tomoatsu Ishibashi, Koichi Fukaya, Yasuyuki Motoshima, Yohei Eto +1 more | 2021-08-17 |
| 10991602 | Substrate washing device | Koichi Fukaya, Tomoatsu Ishibashi | 2021-04-27 |