Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094548 | Apparatus for cleaning substrate and substrate cleaning method | Shinji Kajita, Hisajiro Nakano, Tomoatsu Ishibashi, Yasuyuki Motoshima, Yohei Eto +1 more | 2021-08-17 |
| 10991602 | Substrate washing device | Tomoatsu Ishibashi, Hisajiro Nakano | 2021-04-27 |