Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11103972 | Buff processing device and substrate processing device | Hideo Aizawa, Mitsuru Miyazaki, Naoki Toyomura | 2021-08-31 |
| 11056359 | Cleaning apparatus and substrate processing apparatus | Teruaki HOMBO | 2021-07-06 |
| 10926301 | Liquid supplying device and liquid supplying method | Fujihiko Toyomasu | 2021-02-23 |
| 10898987 | Table for holding workpiece and processing apparatus with the table | Naoki Toyomura, Mitsuru Miyazaki | 2021-01-26 |