Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195736 | Substrate processing apparatus, method of detaching substrate from vacuum suction table of substrate processing apparatus, and method of placing substrate onto vacuum suction table of substrate processing apparatus | Naoki Toyomura, Takuya Inoue | 2021-12-07 |
| 11103972 | Buff processing device and substrate processing device | Hideo Aizawa, Junji Kunisawa, Naoki Toyomura | 2021-08-31 |
| 11090692 | Cleaning liquid supplying system, substrate processing apparatus and substrate processing system | Akira Imamura, Takuya Inoue, Shozo TAKAHASHI | 2021-08-17 |
| 10898987 | Table for holding workpiece and processing apparatus with the table | Naoki Toyomura, Junji Kunisawa | 2021-01-26 |