Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195736 | Substrate processing apparatus, method of detaching substrate from vacuum suction table of substrate processing apparatus, and method of placing substrate onto vacuum suction table of substrate processing apparatus | Mitsuru Miyazaki, Takuya Inoue | 2021-12-07 |
| 11103972 | Buff processing device and substrate processing device | Hideo Aizawa, Junji Kunisawa, Mitsuru Miyazaki | 2021-08-31 |
| 10898987 | Table for holding workpiece and processing apparatus with the table | Mitsuru Miyazaki, Junji Kunisawa | 2021-01-26 |