Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169450 | Pneumatic support device and lithographic apparatus with pneumatic support device | Hans Butler, Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Martinus Van Duijnhoven | 2021-11-09 |
| 11029612 | Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness | Maarten Hartger Kimman, Hans Butler, Olof Martinus Josephus Fischer, Christiaan Alexander Hoogendam, Theodorus Mattheus Joannus Maria Huizinga +2 more | 2021-06-08 |
| 10962890 | Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method | Wilhelmus Franciscus Johannes Simons, Dave Braaksma, Hans Butler, Hendrikus Herman Marie Cox, René Wilhelmus Antonius Hubertus LEENAARS +2 more | 2021-03-30 |
| 10955761 | Lithographic apparatus, lithographic projection apparatus and device manufacturing method | Hans Butler | 2021-03-23 |