Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10962890 | Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method | Wilhelmus Franciscus Johannes Simons, Dave Braaksma, Hans Butler, René Wilhelmus Antonius Hubertus LEENAARS, Stephan Christiaan Quintus Libourel +2 more | 2021-03-30 |
| 10955759 | Lithographic apparatus and device manufacturing method | Olof Martinus Josephus Fischer | 2021-03-23 |