Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169450 | Pneumatic support device and lithographic apparatus with pneumatic support device | Hans Butler, Joep Sander De Beer, Jeroen Pieter Starreveld, Martinus Van Duijnhoven, Maurice Willem Jozef Etiënne Wijckmans | 2021-11-09 |