Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133174 | Reduced volume processing chamber | Han-Wen Chen, Steven Verhaverbeke, Jean Delmas | 2021-09-28 |
| 11011392 | Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device structures | Steven Verhaverbeke, Han-Wen Chen | 2021-05-18 |
| 10937726 | Package structure with embedded core | Han-Wen Chen, Steven Verhaverbeke, Giback Park, Kyuil Cho, Kurtis Leschkies +2 more | 2021-03-02 |