Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198604 | Liquid lithium supply and regulation | Bernard Frey | 2021-12-14 |
| 11133174 | Reduced volume processing chamber | Roman Gouk, Han-Wen Chen, Steven Verhaverbeke | 2021-09-28 |
| 11018032 | High pressure and high temperature anneal chamber | Steven Verhaverbeke, Kurtis Leschkies | 2021-05-25 |