Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11017997 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Ning Li, Mihaela Balseanu, Li-Qun Xia, Maribel Maldonado-Garcia | 2021-05-25 | $67,143,000 |