Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017997 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Ning Li, Mihaela Balseanu, Li-Qun Xia, Maribel Maldonado-Garcia | 2021-05-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017997 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Ning Li, Mihaela Balseanu, Li-Qun Xia, Maribel Maldonado-Garcia | 2021-05-25 |