Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017997 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Cong Trinh, Ning Li, Mihaela Balseanu, Li-Qun Xia | 2021-05-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017997 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Cong Trinh, Ning Li, Mihaela Balseanu, Li-Qun Xia | 2021-05-25 |