TS

Takashi Sasa

TL Tokyo Electron Limited: 2 patents #149 of 858Top 20%
Overall (2020): #115,650 of 565,922Top 25%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10734251 Liquid processing apparatus, liquid processing method, and storage medium for liquid process Koji Takayanagi, Yukie Minekawa, Yuichi Yoshida, Kousuke Yoshihara, Yuichi Terashita +1 more 2020-08-04
10655619 Pump, pump device, and liquid supply system Daisuke Ishimaru, Takahiro Okubo, Tomoyuki Yumoto, Tomohiko Muta 2020-05-19