Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876204 | Substrate processing apparatus, exhaust pipe coating method and substrate processing method | — | 2020-12-29 |
| 10799896 | Substrate processing apparatus, method of coating particle in process gas nozzle and substrate processing method | — | 2020-10-13 |
| 10559460 | Film forming apparatus and film forming method | Akira Shimizu, Akinobu Teramoto, Tomoyuki Suwa, Yoshinobu Shiba | 2020-02-11 |
| 10535501 | Film forming apparatus, film forming method and non-transitory storage medium | Yamato Tonegawa | 2020-01-14 |