AT

Akinobu Teramoto

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #558,725 of 565,922Top 100%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10559460 Film forming apparatus and film forming method Akira Shimizu, Katsutoshi Ishii, Tomoyuki Suwa, Yoshinobu Shiba 2020-02-11