YS

Yoshinobu Shiba

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #210,772 of 565,922Top 40%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10559460 Film forming apparatus and film forming method Akira Shimizu, Katsutoshi Ishii, Akinobu Teramoto, Tomoyuki Suwa 2020-02-11