Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573514 | Method of forming silicon-containing film | Tsubasa WATANABE | 2020-02-25 |
| 10535501 | Film forming apparatus, film forming method and non-transitory storage medium | Katsutoshi Ishii | 2020-01-14 |