Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844487 | Film deposition method and film deposition apparatus | Yutaka Takahashi, Masahiro Murata | 2020-11-24 |
| 10790182 | Substrate holding mechanism and substrate processing apparatus using the same | — | 2020-09-29 |
| 10787740 | Film formation time setting method | — | 2020-09-29 |
| 10748758 | Method for depositing a silicon nitride film and film deposition apparatus | Yutaka Takahashi, Kazumi Kubo | 2020-08-18 |
| 10683573 | Film forming apparatus | Shigehiro Miura, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2020-06-16 |
| 10643837 | Method for depositing a silicon nitride film and film deposition apparatus | Yutaka Takahashi, Kazumi Kubo | 2020-05-05 |
| 10636648 | Film deposition method of depositing film and film deposition apparatus | Kazumi Kubo, Yutaka Takahashi | 2020-04-28 |
| 10604837 | Film deposition apparatus | Shigehiro Miura | 2020-03-31 |
| 10593541 | Film deposition method | — | 2020-03-17 |
| 10584416 | Substrate processing apparatus | Yukio Ohizumi, Manabu Honma, Takeshi Kobayashi | 2020-03-10 |